FIELD: analytical methods. SUBSTANCE: sensor contains substrate with, applied onto one of its sides, heating layer of resistive composite material consisting of ruthenium dioxide (basis) and glass binder, current contact jaws, and bond areas for heating layer. The other side of substrate is coated by semiconductor gas-sensitive layer, current contact jaws, and bond areas for gas-sensitive layer. As glass binder, glass containing alkali-earth metal borosilicate with tin oxide added is utilized. Current contact jaws can be attached to bond areas by the aid of fastening members, bond areas and fastening members are made of material having the same element composition as heating layer but higher ruthenium oxide content. EFFECT: increased sensitivity. 2 cl, 1 dwg
Title | Year | Author | Number |
---|---|---|---|
DIFFERENTIAL SENSOR FOR GAS ANALYSER | 2009 |
|
RU2403563C1 |
SEMICONDUCTOR GAS SENSOR | 1997 |
|
RU2114422C1 |
GAS-SENSITIVE DETECTOR | 2019 |
|
RU2718133C1 |
MICROHEATER FOR SEMICONDUCTOR CHEMICAL GAS SENSOR | 2022 |
|
RU2797145C1 |
GLASS BINDER FOR PASTES OF THICK-FILM RESISTORS | 1992 |
|
RU2044350C1 |
DETECTING ELEMENT OF GAS SENSOR | 2007 |
|
RU2343470C1 |
GLASS | 1994 |
|
RU2069198C1 |
SEMICONDUCTOR METAL-OXIDE GAS SENSOR | 2001 |
|
RU2206082C1 |
SOLID-STATE INTEGRAL GAS FLOW COUNTER | 2004 |
|
RU2257567C1 |
SEMICONDUCTOR GAS SENSOR AND PROCESS OF ITS MANUFACTURE | 1998 |
|
RU2143678C1 |
Authors
Dates
1997-12-10—Published
1994-02-11—Filed