FIELD: physics; measurement.
SUBSTANCE: invention refers to measurement technology and can be used in meters for environmental control, concentration measurement and foul gas travel detection, leakage testing of products containing hazardous chemical agents, as well as in other devices, applied in metrology, various industries, and research investigations. Detecting element of gas sensor contains carrier covered from one side with metal oxide gas-sensing film produced by thick film technology. Another side of the carrier is coated with metal film heater. Gas-sensing film includes modifiers as ruthenium dioxide, ferric and copper oxides. Film thickness is 5÷10 mcm at the following ratio: ruthenium dioxide - 0.2÷0.6 wt %, ferric oxide - 1.0÷5.0 wt %, copper oxide - 0.5÷1.5 wt %.
EFFECT: higher selectivity of detecting element of gas sensor with high time-stable performance.
5 dwg
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Authors
Dates
2009-01-10—Published
2007-05-03—Filed