FIELD: medical engineering. SUBSTANCE: thin-film capacitive pressure sensor development on the basis of three dielectric films has foil membrane 8 coated with dielectric films 9, 10 which is upper plate of first capacitor and two plates 12, 13 of second capacitor formed concentrically on third film 11 positioned on upper surface of membrane 8. Presence of second sensing element (second capacitor) makes it possible to raise information content of sensor due to provision for checking the heart operation rhythm. EFFECT: higher measurement results. 1 dwg
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SU1729198A1 |
