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2 107 970

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C1

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IPC

(21) (22)

Application

95121032/09, 1995-12-13

(22)

Actual filing date

1995-12-13

(45)

Published

1998-03-27

(72)

Inventor

Krivobokov V.P.Kuz'Min O.S.Legostaev V.N.

(73)

Holder

Nauchno-Issledovatel'Skij Institut Jadernoj Fiziki Pri Tomskom Politekhnicheskom Universitete

MAGNETRON SPRAYING SYSTEM Russian patent published in 1998 - IPC

Abstract RU 2107970 C1

FIELD: plasma engineering; spraying thin films of metals and their alloys on sheet insulating materials of large area. SUBSTANCE: system has chamber accommodating cathodes and magnetic system. Cathodes are made in the form of sprayed material tubes provided with individual magnetic systems placed vertically in single row and spaced 100-200 mm apart; substrates are made of sheet material and placed on either side along side wall of chamber; they are free to displace relative to cathode row. EFFECT: improved design. 4 dwg

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RU 2 107 970 C1

Authors

Krivobokov V.P.

Kuz'Min O.S.

Legostaev V.N.

Dates

1998-03-27—Published

1995-12-13—Filed

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