MAGNETRON SPRAYING SYSTEM Russian patent published in 1998 - IPC

FIELD: plasma engineering; spraying metal or metal alloy films on surfaces. SUBSTANCE: system has anode, target cathode, and magnetic system. The latter has nonretentive body that functions as external magnetic core that houses inside central magnetic core placed along system axis in spaced relation to ends. Entire space between magnetic cores along central magnetic core is filled with permanent magnets. Gaps at system ends accommodate additional permanent magnets closed on central magnetic core side with end lugs made of nonretentive material. Gap is provided between end lugs and central magnetic core. EFFECT: greatly enlarged region of uniform spraying of coat without increasing system size. 4 dwg