FIELD: measurement technology. SUBSTANCE: matrix thin-film transducer is meant for measurement of pressure, temperature, deformation and heat flux during aerodynamic tests of aviation equipment. Structure of matrix thin-film transducer is formed from seven metallized and nonmetallized films to create sensitive elements on surface of second film. First film is insulator between second dielectric film and article. Fourth and seventh dielectric films are perforated. Sensitive elements of deformation, temperature and heat flux are formed on surface of second film and sensitive elements for measurement of pressure are formed on surfaces of third, fifth and sixth dielectric films. EFFECT: facilitated manufacture, increased operational reliability. 2 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| CAPACITIVE PRESSURE TRANSDUCER | 1994 |
|
RU2102712C1 |
| PRESSURE AND TEMPERATURE SENSITIVE ELEMENT | 1996 |
|
RU2110778C1 |
| PRESSURE AND TEMPERATURE-SENSITIVE ELEMENT | 1998 |
|
RU2145064C1 |
| CAPACITIVE MATRIX PRESSURE SENSOR | 1992 |
|
RU2018099C1 |
| CAPACITIVE PRESSURE SENSOR AND METHOD OF ITS MANUFACTURE | 1996 |
|
RU2099681C1 |
| CAPACITIVE PRESSURE PICKUP | 1994 |
|
RU2084848C1 |
| VARIABLE-CAPACITANCE PRESSURE TRANSDUCER AND METHOD OF ITS ASSEMBLING | 1999 |
|
RU2166742C1 |
| CAPACITIVE PRESSURE FLUCTUATION TRANSDUCER AND PROCESS OF ITS ASSEMBLY | 1999 |
|
RU2145065C1 |
| CAPACITIVE MATRIX PRESSURE PICK-UP | 0 |
|
SU1797700A3 |
| PRESSURE MEASURING DEVICE | 1994 |
|
RU2084847C1 |
