METHOD FOR VACUUM DEPOSITION OF CERAMIC BARRIER COATING ON FERRITE, CERAMIC AND FERRO-CERAMIC SURFACES (VERSIONS) Russian patent published in 2015 - IPC C23C14/06 C23C14/34 

FIELD: chemistry.

SUBSTANCE: method includes placing an article in a working chamber and evacuating said chamber; plasma pretreatment of the article by ion-beam cleaning with argon and exposing the article to the plasma of an oxidant-containing gas at P_work=10⁰-10^-1 Pa, said gas being oxygen; evacuating the working volume to residual pressure P_res=10^-1-10^-3 Pa; reactive arc cathode sputtering in the medium of a reactive gas - oxygen or nitrogen or a mixture of nitrogen and oxygen and depositing on the surface of the article a ceramic barrier coating at operating pressure of the reactive gas P_work=10^-2-10^-1 Pa. In another version of the invention, evacuation of the working volume to residual pressure P_res=10^-1-10^-3 Pa is followed by reactive sputtering of a magnetron target at discharge current I=1.5-20 A and operating pressure of the reactive gas, which consists of oxygen or a mixture of nitrogen with argon or a mixture of nitrogen with oxygen and argon, P_work=10^-2-10⁰ Pa, wherein the cathode or magnetron target is made of a metal selected from: copper, aluminium, tin, chromium, titanium, zirconium, molybdenum, tantalum, nickel, magnesium, tungsten, iron or an alloy based thereon.

EFFECT: obtaining ceramic barrier coatings with resistivity greater than 10 ohm·m.

2 cl, 2 ex