FIELD: modifying of surface layers of details. SUBSTANCE: ions of inert gases, namely argon and neon ions, are used for purification. Processing is carried out within period more than 3000 s, energy in 50-350 eV and current density in 3-10 mA/cm2 being used. The process is followed by ion alloyage which takes place within 500-2500 s with the help of nitrogen, energy in 30-50 eV and density of ion current in 30-60 mkA/cm2 being used. The latter process is co-operated with vacuum roasting at 450-550 C which is carried out within 2-2.4, pressure of residual gases being 10-3-5•10-3 Pa. EFFECT: improved efficiency of the method.
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Authors
Dates
1998-07-27—Published
1996-08-20—Filed