FIELD: physics. SUBSTANCE: process measuring electric potential on surfaces of dielectric samples includes gain of low-energy electrons close to surface of sample, acceleration of gained electrons in electrostatic field of sample and measurement of energy of accelerated electrons. For presentation of distribution of electric potential on examined part pd sample image of sample is formed in beams of electrons accelerated in electrostatic field of sample and energy of these electrons is measured in each point of image. Method is realized with the aid of device composed of source of electrons having low energy near surface, analyzer of energy of these electrons after acceleration in electrostatic field of sample across which input there is placed device for image transfer. Particle recorder incorporates elements forming two-dimensional surface. EFFECT: measurement of potential values on surface of sample in several points simultaneously. 2 cl, 2 dwg
