SMALL-SIZE MAGNETRON ATOMISER Russian patent published in 2010 - IPC C23C14/35 C23C14/56 

FIELD: metallurgy.

SUBSTANCE: invention refers to application of coating, particularly to small-size magnetron atomiser of inverse type and can be implemented for application of thin films of metals and their compounds in vacuum on thin wires and fibres. The inverse cylinder atomiser consists of an anode, of a water cooled cylinder cathode, of a magnet system generating magnet field over surface of the cathode. Diametre of the atomised cylinder cathode is 0.5-5 mm, while the device operates at pressure of working gas 10¹÷10² Pa and induction of magnet field over surface of the cathode 2-10 kgf.

EFFECT: facilitating increased efficiency of utilisation of metal atomised from cathode for coating due to significant decrease of diametre of cylinder cathode.

2 dwg