FIELD: elementary analysis of blind holes and grooves whose height is mush greater than linear dimensions of bottom. SUBSTANCE: bottom section is irradiated with compensated-drift electron probe. Generated electric field is used for compensation. Secondary electrons not reflected from cavity walls by analyzer of cylindrical mirror type are recorded. Composition of cavity bottom is judged from Auger spectrum of secondary electrons. Device implementing this method has electron gun and analyzer of cylindrical mirror type. Deflector is installed between analyzer and analyzed entity. In addition, device has computer with monitor. Secondary electron detector is connected to computer input. Computer output is connected to input of analyzer control unit whose first output is connected to mirror and second one, to input of deflector control unit. Output of the latter is connected to additional gate electrodes installed in deflector. EFFECT: improved accuracy of analysis. 2 cl, 2 dwg
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