MAGNETRON SOURCE Russian patent published in 1999 - IPC

FIELD: technique of coatings by spraying of materials from liquid phase. SUBSTANCE: magnetron source has water-cooling magnetic system located in body 1, crucible 3 made of refractory nonmagnetic material, additional source 4 of target molten material connected with hollow of crucible 3 through shutoff member 6 and anode 7. Crucible 3 has also cover made in the form of two plates 9 from refractory nonmagnetic material with through capillary channels 10 extending with their one end to external surface of plates 9, and with the other end, to their internal surface. EFFECT: production of high-quality coatings due to possibility of arrangement of magnetron source above base with simultaneous extension of working cycle duration. 2 cl, 3 dwg