DEVICE AND METHOD FOR COATING LONG PRODUCTS Russian patent published in 2019 - IPC C23C14/35 

FIELD: technological processes.

SUBSTANCE: invention relates to application of coatings on cylindrical structural articles primary on the fuel elements for nuclear reactor tank. In device for application of coatings article (1) transported to electrode assembly (2) is immovably installed in cavity of cylindrical cathode (4) along its axis (7) during magnetron sputtering. Magnetic unit (6) comprises extended magnet core (12) in form of hollow shaft equipped with drive (13), on inner surface of which there are extended rows of permanent magnets (15). Extended anode (3) with high geometrical transparency is installed opposite the internal surface of the cathode. Article is placed rigidly in the cavity of the cylindrical cathode communicating with vacuum chamber (8); a magnetron sputtering cycle is performed during rotation of the magnetic unit located outside the cylindrical cathode. Cooling of electrode assembly is performed by means of circulation of liquid heat carrier (17) through cooled casing (5).

EFFECT: creation of high-efficiency technology of application of protective coatings on extended structural products.

17 cl, 3 dwg