FIELD: physics.
SUBSTANCE: semiconductor base is made from a polycrystalline film cadmium selenide doped with indium antimonide. The substrate is the electrode pad of a piezo-quartz resonator.
EFFECT: high sensitivity of the sensor and manufacturability thereof.
3 dwg
| Title | Year | Author | Number | 
|---|---|---|---|
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 | RU2607733C1 | 
| SEMICONDUCTING GAS ANALYSER | 2007 | 
 | RU2350936C1 | 
| SEMICONDUCTOR GAS ANALYSER | 2009 | 
 | RU2398219C1 | 
| GAS ANALYSER OF CARBON OXIDE | 2009 | 
 | RU2395799C1 | 
| GAS SENSOR | 2008 | 
 | RU2437087C2 | 
| SEMICONDUCTOR GAS SENSOR FOR OXYGEN TRACE SUBSTANCES | 2015 | 
 | RU2610349C1 | 
| NITROGEN DIOXIDE INDICATOR | 2004 | 
 | RU2274853C1 | 
| CARBON MONOXIDE TRANSDUCER | 2006 | 
 | RU2326371C1 | 
| NANO-SEMICONDUCTOR GAS SENSOR | 2010 | 
 | RU2422811C1 | 
| SEMICONDUCTOR GAS ANALYSER | 2011 | 
 | RU2464553C1 | 
Authors
Dates
2012-12-10—Published
2011-05-20—Filed