DEVICE FOR INSPECTING SURFACE ROUGHNESS Russian patent published in 2014 - IPC G01B15/08 H01J35/00 G01N23/207 

FIELD: physics.

SUBSTANCE: device has, mounted on a board, a three-axis precision table on which there is an X-ray tube which emits in the soft X-ray range, and an ion source for cleaning the target, a monochromator chamber in which there is a monochromator and a probing beam intensity monitor, and a chamber for analysed samples in which there is a five-axis goniometer. The monochromator chamber and the chamber for analysed samples are connected to each other through a first gate; the monochromator used is a spherical Schwarzschild lens; the monochromator chamber is connected to an ion pump and the chamber for analysed samples is connected in series through a second gate to turbomolecular and forevacuum clean pumps, respectively.

EFFECT: high intensity of a quasi-parallel beam of soft X-ray radiation on an analysed sample and studying roughness of samples with a curved surface.

2 cl, 1 dwg