METHOD AND DEVICE FOR EXCITATION OF HIGH- FREQUENCY ELECTRIC DISCHARGE IN GAS LASER Russian patent published in 1999 - IPC

FIELD: quantum electronics, in particular, carbon dioxide, nitrogen and eximer lasers. SUBSTANCE: method for excitation of discharge in gas laser involves application of additional flow of electrically neutral cooled gas mix in addition to main flow of laser gas mix. Additional gas flow is fed into main flow which passed discharge region which is adjacent to electrode and provide basic power input from discharge. High-frequency electric discharge is excited in gas laser which has gas delivery circuit with two electrodes which form inter-electrode gap, gas pumping device, and at least one additional gas channel, which output is directed towards main flow which passes discharge region which is adjacent to electrode. EFFECT: increased pulse rate, elimination of parasitic discharges outside electrode region, increased efficiency of laser. 6 cl, 4 dwg