METHOD OF FORMATION OF PROTECTIVE LAYER OF MAGNESIUM OXIDE Russian patent published in 1999 - IPC

FIELD: gas-discharge engineering; applicable in devising and manufacture of AC monochromatic and chromatic gas-discharge panels. SUBSTANCE: method includes formation of protective layer of magnesium oxide on AC gas-discharge panel using the method of magnetron sputtering of metal target in oxidizing medium of oxygen with argon, sputtering is carried out at oxygen content in oxidizing medium within 17 to 45% and at working pressure of oxidizing medium of ((1.0-1.1) x 10^-1 Pa. Before sputtering, pressure of oxidizing medium is set within (1.2-3.25) x 10^-1 Pa and held for 2-3 min. Sputtering is carried out at constant voltage of 160-210 V and current of 18-30 A. EFFECT: higher quality of AC gas-discharge panels and efficiency of process of formation of protective layer of magnesium oxide. 4 cl