HIGH-TEMPERATURE SUPERCONDUCTING TAPE MANUFACTURING METHOD AND TAPE Russian patent published in 2019 - IPC H01L39/24 C23C14/06 C23C30/00 C23C14/28 

FIELD: manufacturing technology.

SUBSTANCE: invention relates to production of high-temperature superconducting tape. Buffer layers are deposited on the substrate in the following sequence: an aluminum oxide layer, an yttrium oxide layer, a magnesium oxide layer, a homoepitaxial magnesium oxide layer and a lanthanum manganite layer, depositing high-temperature superconductor layer on buffer layers and applying at least one protective layer. Layers of magnesium oxide and homoepitaxial magnesium oxide are deposited by electron-beam evaporation. Magnesium oxide layer is deposited with simultaneous irradiation of the deposition zone with argon ion flow, a layer of homoepitaxial magnesium oxide is deposited while heating the substrate to temperature of 400–800 °C. Application of high-temperature superconductor layer to buffer layers is carried out by pulse laser deposition with substrate heating to 500–900 °C and subsequent annealing at temperature of 300–500 °C in an oxygen atmosphere.

EFFECT: high stability of properties of the obtained high-temperature superconducting tape.

11 cl, 1 dwg