PROCESS OF MANUFACTURE OF RELIEF PATTERNS ON SPHERICAL SURFACES AND GEAR FOR ITS IMPLEMENTATION Russian patent published in 1999 - IPC

FIELD: manufacture of sensitive elements for electrostatic gyros. SUBSTANCE: continuous metal coat and then layer of photoresist are deposited on spherical surfaces of vacuum chamber and rotor in turn. Light image from flat mask is formed on outer spherical surface of end element of projection device and then is directly transferred to photoresist layer bordering on it. Gear for implementation of process has optical elements and flat mask. End optical element presents fiber-optical image converter made of optical fibers laid regularly which butts form flat surface of one side and spherical surface on the other side. Flat surface abuts on mask and spherical surface adjoins spherical surface of illuminated part. Spherical surface of fiber-optical converter can be convex one with light guides diverging from flat surface to spherical one with fiber diameters increasing from flat to spherical surface or concave one with light guides converging from flat to spherical surface with fiber diameters decreasing from flat surface to spherical one. EFFECT: increased precision of relief pattern, simplified design of projection unit. 4 cl, 5 dwg