PROCESS OF PHOTOLITHOGRAPHY Russian patent published in 1997 - IPC

Abstract RU 2096935 C1

FIELD: electronics. SUBSTANCE: first layer of positive photoresistors is deposited on substrate, is dried and exposed without mask. Then second layer of positive photoresistor is deposited, is dried and exposed through mask and pattern is developed in two-layer film. Value t1 of exposure of first layer of photoresistor is chosen equal to 2 t2, where t2 is value of exposure of second layer of photoresistors within range of exposure latitude. EFFECT: improved efficiency of process. 1 tbl

Similar patents RU2096935C1

Title Year Author Number
PHOTORESIST MASK GENERATION PROCESS 2000
  • Latysheva N.D.
  • Skupov V.D.
  • Smolin V.K.
RU2195047C2
METHOD OF PHOTOLITHOGRAPHY 2015
  • Ilin Evgenij Yurevich
  • Zhukov Andrej Aleksandrovich
  • Popova Elena Viktorovna
  • Pavlov Aleksandr Aleksandrovich
RU2586400C1
PROCESS OF MANUFACTURING BOARDS FOR HYBRID INTEGRATED CIRCUITS 1992
  • Smolin V.K.
RU2040128C1
SOLUTION FOR MEASURED ETCHING OF CUPRIC PHTHALOCYANINE FILMS 1995
  • Smolin V.K.
  • Gusev V.K.
  • Golubeva L.N.
RU2090652C1
NEGATIVE PHOTORESIST FOR "EXPLOSIVE" PHOTOLITHOGRAPHY 2017
  • Kuznetsova Nina Aleksandrovna
  • Chaltseva Tatyana Vladimirovna
  • Norkina Raisa Nikolaevna
  • Erlikh Roald Davidovich
  • Solovev Viktor Vasilevich
  • Rodnaya Anna Igorevna
  • Afanasev Mikhail Mefodevich
  • Koroleva Natalya Aleksandrovna
RU2648048C1
METHOD OF MAKING CONTROL ELEMENTS OF LIQUID CRYSTAL SCREEN 1991
  • Vysotskij V.А.
  • Мoiseeva О.G.
  • Smirnov А.G.
  • Usenok А.В.
RU2019864C1
PROCESS OF FORMATION OF PHOTOLITHOGRAPHIC PATTERN IN SILICON DIOXIDE FILM ON RELIEF SURFACE OF SILICON WAFER 1993
  • Kozin S.A.
  • Chistjakova T.G.
RU2111576C1
MANUFACTURING PROCESS FOR FLEXIBLE PRINTED-CIRCUIT BOARDS AND CABLES 0
  • Glukhov Aleksandr Sergeevich
  • Yashin Anatolij Ivanovich
  • Devochkin Boris Vasilevich
SU1812645A1
POSITIVE-ACTING PHOTORESIST AND ITS PROCESSING 1991
  • Frolov Vladimir Mikhajlovich
  • Selivanov Gennadij Konstantinovich
  • Firsov Rudol'F Grigor'Evich
RU2012918C1
PROCESS OF MANUFACTURE OF ELECTRODE SYSTEM ON SPHERICAL SURFACE OF VACUUM CHAMBER OF ELECTROSTATIC GYROSCOPE 1996
  • Guttovskaja A.K.
  • Agroskin B.N.
  • Ginzburg V.A.
  • Parfenov O.I.
RU2127868C1

RU 2 096 935 C1

Authors

Smolin V.K.

Donina M.M.

Dates

1997-11-20Published

1996-04-09Filed