FIELD: microelectronics; semiconductor integrated circuits. SUBSTANCE: multichip module has several semiconductor chips whose contact pads are arranges at same level; chip-to-chip space is filled with no- shrinkage structural bond not protruding beyond front surface that forms monolithic module with planar-mosaic structure, its thickness making up 1.0-1.5 of that of semiconductor chips; chip-to-chip switching members are arranged inside module in one or more planes parallel to front surface of semiconductor chips. EFFECT: improved strength and reliability of chip-to- chip switching; facilitated manufacture. 2 cl, 1 dwg
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PROCESS OF MANUFACTURE OF SEMICONDUCTOR MODULE | 1999 |
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Authors
Dates
1999-10-27—Published
1999-03-23—Filed