FIELD: X-ray equipment. SUBSTANCE: device has jacket 12, power supply, extended tube sound 14, target unit 26, beam control unit 29. Jacket covers electron beam source 22 and is equipped with members for region of electron beam along beam trajectory. The power supply provides possibility to control voltage, current and generation time of electron beam. Target unit comprises target member, which is located along beam trajectory and is suited for emitting X rays in specific spectral range in response to inclined electrons. Beam control unit 29 has deviation member 30, feedback circuit 30, and deviation controller 144. Deviation member 30 shifts beam from imaginary axis of chosen surface region of target member 26 in response to deviation control signal. The feedback circuit comprises members for detection of deviation in order to measure beam deviation, and members for generation of suitable feedback response signal. EFFECT: design of low-power X-ray source. 84 cl, 32 dwg
