FIELD: measurement technology. SUBSTANCE: 50-100 Angstrom thickness titanium nitride adhesion layer is applied onto dielectric substrate, then thermosensitive thin-film element made of high-resistance metal is applied. Resistance thermometer has high thermal stability during process of exploitation at high temperatures. It also is characterized by reasonable linearity of output characteristic. EFFECT: improved quality of operation. 4 dwg
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Authors
Dates
1996-11-20—Published
1993-07-15—Filed