CANTILEVER FOR SCANNING PROBE MICROSCOPE Russian patent published in 2000 - IPC

FIELD: nanoengineering equipment. SUBSTANCE: proposed cantilever for microscope intended to observe, vary, and modify surfaces of objects under tunnel and atomic-power conditions has base mounting one or more beams each carrying needle on its end most distant from base. Each beam is crosswise thinned triangular-section structure. Cantilever is noted for high normal sensitivity without changing stray cross sensitivity, improved repeatability of parameters and mechanical strength of device, reduced nonlinear dependence of laser beam reflected from cantilever beam on normal force applied to the latter; cantilevers can be manufactured with beams for any desired resonant self-excited oscillations. EFFECT: improved design, facilitated manufacture. 5 dwg