CANTILEVER FOR SCANNING SOUNDING MICROSCOPE Russian patent published in 2000 - IPC

Abstract RU 2161344 C1

FIELD: nano- technological equipment, devices ensuring observation, change and updating of surfaces of objects under tunnel and atomic power conditions. SUBSTANCE: cantilever for scanning sounding microscope includes base, girder attached to base, wedge-shaped protrusion whose sharp end is parallel to scanning direction is located on far end of base. Girder of cantilever can have lateral thinning with unspecified, for instance, triangular section. EFFECT: enhanced mechanical strength of cantilever, diminished non-linearity of dependence of picked off signal on relief of scanned surface. 5 dwg

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RU 2 161 344 C1

Authors

Ibragimov A.R.

Rabukhin A.L.

Dates

2000-12-27Published

1999-11-12Filed