SCANNING SOUNDING MICROSCOPE Russian patent published in 2000 - IPC

FIELD: nanometer microscopy equipment. SUBSTANCE: device provides observation, measurement and modification of object surface in scanning tunnel microscope mode or nuclear-power microscope mode. In addition, invention may be used in device, which keep precise position between two objects. Scanning sounding microscope has board, which is connected to sound holder and racks, analyzer, object holder, which is mounted on scanner and is connected to drive. Sound holder is equipped with rests. Drive is designed as mobile carriage with spring-loaded and stationary first rests. It is mounted on flat and V-shaped first guides and is equipped with second guides, which are designed as two flat and one V-shaped guides with facets. Racks of sound holder are designed as three tongs, one of which is spring-loaded and comprises second rests. Holder is mounted on board for movement with respect to board along X, Y and Z coordinates and for interaction of rests to board. Tongs are connected to second guides of drive. EFFECT: increased functional capabilities, simplified design, increased reliability, increased precision of measurements. 1 dwg