HEATING DEVICE FOR SCANNING SONDE MICROSCOPES Russian patent published in 2001 - IPC

FIELD: technological equipment of nana range. SUBSTANCE: invention refers to gears providing cleaning of surfaces of sondes and samples before measurement and other technological operations. Heating device for scanning sonde microscopes has manipulator with gripper, heating element and temperature meter matched to object carrier. Gripper of manipulator is mounted for mechanical separation of object carrier. Heating element is mounted for move relative to object carrier and temperature meter. Object carrier comes in the form of U- shaped asymmetrical temperature compensator with clip having minimum heat conduction. Temperature meter is put on side opposite to object carrier with reference of heating element. Temperature meter can be manufactured in the form of thermocouple installed on manipulator for elastic interaction with object carrier or in the form of pyrometer. Clip of object carrier can be made in the form of guide placed for interaction with thermocouple. EFFECT: simplified design, expanded functional capabilities, enhanced reliability and accuracy of measurement. 2 cl, 1 dwg