NANOELECTRONIC COMPLEX Russian patent published in 2007 - IPC H01J37/26 G12B21/00 

FIELD: nanotechnology; equipment designed for closed-loop manufacture of new nanoelectronic products.

SUBSTANCE: proposed nanoelectronic complex has equipment carrier charging unit holding probe carriers and specimen carriers, equipment pre-treatment unit, measurement chamber incorporating scanning probe microscope with first coordinate displacement system mounting first probe carrier holder, specimen carrier spatially joined with probe carrier, and transport system. Complex is provided with structure forming unit and local-impact unit; measurement chamber has first system for coordinate installation of probe carrier on first holder and second system for coordinate displacement that mounts second holder with second system for coordinate installation of specimen holders; first coordinate displacement system is joined with second one by means of system for coordinate siting of probes and specimens; structure forming unit has structure forming module as well as third holder with third equipment coordinate mounting system; local-impact unit has local-impact module as well as fourth holder with fourth coordinate mounting unit for equipment holders; fourth holder is installed on fourth coordinate displacement system joined with local-impact module by third system for coordinate siting between local-impact module and equipment.

EFFECT: enlarged functional capabilities of nanoelectronic complex.

14 cl, 3 dwg