ULTRAHIGH-VACUUM TRANSPORT SYSTEM Russian patent published in 2010 - IPC H01J37/26 G12B11/00 

FIELD: transport.

SUBSTANCE: invention can be used in loading and unloading of probes and samples in scanning probe microscopes operated in vacuum and limited visual access into reloading area. Proposed transport system comprises loading chamber with first manipulator with gripper and second manipulator with probe and sample cartridges, said chamber being coupled with measurement chamber. The latter comprises first probe carrier holder and second sample carrier holder. Note that probe carrier and sample carrier cartridge is linear one, while first manipulator gripper is coupled with first probe carrier holder and second sample carrier holder.

EFFECT: higher reliability.

6 cl, 2 dwg