TEMPERATURE-COMPENSATED SCANNER Russian patent published in 2001 - IPC

FIELD: nanoelectronics; scanning specimens relative to probe in wide temperature range. SUBSTANCE: scanner that has flange, scanning piezoid with specimen-carrying holder, main and additional servo systems is provided, in addition, with two thermocouples, flexible separating ring with refrigerant conductor, first and second heat-carrying agents. Temperature compensator is made in the form of set of piezoids connected to flange and to ring on respective opposite ends; ring is elastically joined with specimen-carrying holder and the latter, in its turn, is connected to flange through flexible separating ring; heater is mounted on flange for engaging specimen carrier; first thermocouple is engageable with specimen holder and second one, with scanning piezoid; refrigerant conductor is connected to cryostat; first heat-carrying agent is placed between specimen holder and flange and second agent, between piezoid and temperature compensator. EFFECT: enhanced measurement resolving power, enlarged functional capabilities, improved reliability of device. 1 dwg