CRYOGENIC SCANNING PROBING MICROSCOPE Russian patent published in 2006 - IPC G12B21/00 

FIELD: measuring equipment engineering, in particular, engineering of devices for researching samples at atomic level under conditions of extremely low temperatures.

SUBSTANCE: cryogenic scanning probing microscope has first flange, on which rotation drive with rod is mounted, and also linear drive with first holder, directing device, second flange, vibration protection system, probe holder with probe and sample holder with sample. Directing device is made in form of rods. Rods have spherical end pieces and are held on first flange and connected to second flange. Rods are mated with catchers. Catchers are held on first platform with possible mating with spherical end pieces vibration protection system is connected to analyzing block. Analyzing block is made in form of first, second and third platforms. First platform is fixedly connected to second platform. Third platform is mounted on second platform by means of supports with spherical end pieces. Spherical end pieces are mated with V-shaped guides, positioned in third platform. Screw with spherical pusher by its smooth surface is mated with first platform.

EFFECT: improved precision of measurements and reliability of device operation.

6 cl, 6 dwg