CAPACITIVE PRESSURE TRANSDUCER AND PROCESS OF ITS MANUFACTURE Russian patent published in 2001 - IPC

Abstract RU 2171455 C2

FIELD: measurement technology, measurement of pressure under industrial conditions. SUBSTANCE: capacitive transducer 10 of absolute value of pressure includes substrate 14 with electrode 24 put on it and diaphragm unit 12 also placed on substrate. With rise of pressure diaphragm 16 flexes, touches electrode 24 under sensor mode and alters electric capacitance of transducer 10. Measurement of change of capacitance makes it possible to determine change of pressure. Latent through connection is employed to find changes of electric capacitance of space under diaphragm 16 and changes of pressure. Vacuum condition in space is provided by proper selection of thickness of measurement electrode and insulation layer subjected to thermal treatment and by leak-tight connection of diaphragm unit 12 to substrate 14. EFFECT: provision for electric through connection, stable operation and simplification of measurement operations. 21 cl, 18 dwg

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RU 2 171 455 C2

Authors

Ko Ven Kh.

Dates

2001-07-27Published

1995-11-09Filed