COMPENSATION ACCELEROMETER Russian patent published in 2001 - IPC

FIELD: measurement technology. SUBSTANCE: invention related to linear acceleration compensation transducers with electrostatic reversible transducer. Said accelerometer has the first plate made of monocrystal material in which movable element and fixed element are formed, the second and third plates, differential capacitive transducer, two-phase AC voltage generator, DC reference voltage source, and amplifier with two antiphase outputs. Movable element is made as cantilever element of equal thickness over entire length and width of cantilever. Each fixed electrodes of differential capacitive transducer is arranged over length of cantilever from border between movable and fixed elements and end of cantilever. Technical result is improved stability of compensation accelerometer to action of accelerations whose direction does not coincide with direction of measured acceleration. EFFECT: increased range of measured accelerations. 3 cl, 4 dwg