PROCEDURE MEASURING VACUUM Russian patent published in 2001 - IPC

Abstract RU 2175438 C1

FIELD: measurement technology. SUBSTANCE: invention is related to technology of measurement of deep vacuum in pressure range 10-4-10-12 mm Hg and can be employed in design of corresponding vacuum meters. According to invention electron beam is injected into space where vacuum is measured to form virtual cathode in it, duration of its relaxation time taking place thanks to presence of residual gas is measured and pressure is computed by duration of relaxation time. Duration of relaxation time of virtual cathode is found by measurement of duration of pulse of SHF radiation from region of virtual cathode. EFFECT: possibility of remote measurement of vacuum. 1 dwg

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RU 2 175 438 C1

Authors

Dubinov A.E.

Dubinova I.D.

L'Vov I.L.

Mikheev K.E.

Dates

2001-10-27Published

2000-06-22Filed