SCANNING SOUNDING MICROSCOPE WITH LIQUID CELL Russian patent published in 2003 - IPC

FIELD: nanotechnology, devices ensuring analysis of surfaces of specimens in liquid medium with use of methods of scanning sounding microscopy. SUBSTANCE: scanning sounding microscope with liquid cell has platform carrying piezoscanner with specimen holder, plate with cantilever, first seal linked to plate, optical unit tracking cantilever that incorporates laser and photodetector with adjustment systems optically mated with cantilever and unit of preliminary closing in of specimen on cantilever, case and second seal coming in the form of double layer springy membrane which first layer is made of fluoroplastic material and which second layer is produced from elastic material. Springy membrane is anchored between case and specimen holder which presents table with tooth joined with flange to ductile spacer and is placed between tooth and ductile spacer. Plate has filling tube and gas drain, is fixed on case and can be quickly removed. Optical unit tracking cantilever is put on plate, first seal is anchored between plate and case, unit of preliminary closing in of specimen with cantilever is situated between platform and piezoscanner. EFFECT: simplified operation and expanded functional capabilities of scanning sounding microscope. 2 cl, 3 dwg