FIELD: preparation of specimens from semiconductors and dielectric materials for transmission electron microscopy. SUBSTANCE: one surface of specimen submerged in reagent is exposed to action of jet of reagent which leads to its thinning and at final stage of thinning, at moment of emergence of microhole in thinned section of specimen, treated surface of specimen is blocked from reagent by air bubble formed by excessive air pressure created from side of untreated surface of specimen. Gear for realization of this process has chemical cell with former of jet of reagent, object holder with pressure chamber having central conduit one end of which is sealed by installed specimen and the other end of conduit is connected to pressure chamber and to system controlling termination of thinning process produced in the form of U- shaped duct filled with current-conductive fluid, one end of duct being sealed by immobile electrode and the other end of duct being connected to pressure chamber and fitted with mobile electrode-indicator. EFFECT: raised quality of specimen prepared for transmission electron microscopy, simplified design of gear. 2 cl, 1 dwg
