METHOD AND DEVICE FOR PRODUCING SHORT-WAVE RADIATION FROM GAS-DISCHARGE PLASMA Russian patent published in 2003 - IPC

FIELD: lithography, laser engineering, and roentgen microscopy. SUBSTANCE: method used for producing short-wave (including λ = 13.5 nm) radiation in ultraviolet to X-ray band involves pre-ionization in discharge area between coaxial electrodes effected through axial hole in one of electrodes and initiation of pinch-effect discharge. Pre-ionization is made with radiation flux of wavelengths in ultraviolet to X-ray band and with accelerated electron stream from plasma of pulsed creepage discharge fired in area optically isolated from pinch-effect discharge axis at rate of discharge voltage rise across it over 10¹¹ V/s; in the process axisymmetric radiation fluxes and electron streams are formed and conveyed to beyond- the-axis part of discharge area. Pre-ionization source is disposed beyond discharge chamber and is made in the form of axisymmetric creepage discharge producing system that has extended initiating electrode covered with insulating layer that carries igniter electrode on its surface; initiating electrode is coaxial to discharge-chamber electrodes and is made so that insulating layer occurs in area optically isolated from discharge chamber axis and that one of electrodes of creepage discharge producing system is built integral with one of electrodes of discharge chamber. Dielectric insert with axial hole carrying discharge-chamber electrodes on its surface may be introduced in discharge chamber. EFFECT: enhanced efficiency, energy, mean power, and stability of gas-discharge plasma radiation. 2 cl, 2 dwg