TECHNIQUE MEASURING OPTICALLY FORM OF SURFACE OF THREE-DIMENSIONAL OBJECT Russian patent published in 2003 - IPC

FIELD: topography, measurement of roughness. SUBSTANCE: original object is illuminated by light bean along first chosen direction, spatial distribution of intensity of beam in plane perpendicular to optical axis of beam changes according to specified periodic law. First image is recorded along second direction different from first direction and coinciding with optical axis of displaying optical system. Original object is replaced with object having flat location surface, this object is illuminated by same radiation along first direction and second image is recorded along second direction. Original object is additionally irradiated by light beam along first direction which spatial distribution of intensity in plane perpendicular to optical axis of beam is homogeneous and third image of object which is half-tone image of original object is recorded along second direction. Fourth image representing double-gradation image of original object comprising white and black regions is formed by third image. Fifth image matching first image in white regions of fourth image and matching second image in black regions of fourth image is synthesized. Joint processing of fifth and second images is conducted to restore form of surface of three-dimensional object. EFFECT: potential for measurement of form of any complicated object with simultaneous increase of measurement precision. 8 dwg