RESONATOR OF PIEZOELECTRIC GYROSCOPE Russian patent published in 2003 - IPC

FIELD: construction of wave solid-state gyroscopes on piezoelectric monocrystal. SUBSTANCE: resonator has disc put on rod located on base. Upper surface of disc has several segment electrodes and its lower surface carries one common electrode. Contact lands are made in central part of disc equal to diameter of rod. Electrodes are formed from one lower adhesive layer and contact lands are produced from multilayer thin-film structure in which electrodes are lower sublayer. Thus merit factor of resonator rises thanks to diminished thickness of coat of resonator disc. EFFECT: risen merit factor of resonator. 2 cl, 2 dwg