METHOD FOR PREPARING HIGH-PURITY ISOTOPE-ENRICHED SILANE Russian patent published in 2004 - IPC

FIELD: inorganic chemistry, chemical technology. SUBSTANCE: invention concerns the development of method for preparing high-purity silane enriched with isotopes Si²⁸ or Si²⁹, or Si³⁰ and used for preparing Si as monocrystals and films and also for covers made of monoisotope SiO₂. High-purity isotope-enriched silane is prepared by reduction reaction of isotope-enriched silicon tetrafluoride with calcium hydride at 180-200 C. Reduction is carried out by static method in the closed system under pressure 30 atm, not less. Prepared silane is purified from fluorine-containing impurities by passing the prepared silane through reactor with calcium hydride. Then silane is purified from hydrocarbon impurities by fractionation method preferably. EFFECT: increased yield and purity of silane. 2 cl, 1 tbl, 1 ex