METHOD FOR SYNTHESIS OF HIGHLY PURE SILANE (VERSIONS) Russian patent published in 2010 - IPC C01B33/04 

FIELD: chemistry.

SUBSTANCE: invention can be used in synthesis of highly pure silane used in production of silicon in form of monocrystals and films and coatings from isotope enriched silicon dioxide. Silicon tetrafluoride is reduced by calcium hydride at 180-200 °C with subsequent purification from fluorine-containing impurities by passing the obtained silane through a reactor with calcium hydride and hydrocarbon impurities. Silicon tetrafluoride is reduced in the presence of hydrogen with mechanical activation in a horizontally placed flow reactor rotating at 90-150 rpm, for which the reactor is filled with grinding bodies. Highly pure isotope enriched silanes ²⁸SiH₄, ²⁹SiH₄ or ³⁰SiH₄ are obtained in the version of the invention.

EFFECT: invention enables to obtain silane with output of 95%, content of hydrocarbon impurities in the silane rectificate is less than 9-10^-7 mol %.

8 cl, 4 ex