MICROMECHANICAL ACCELEROMETER WITH HIGH RESISTANCE TO THERMOMECHANICAL STRESSES Russian patent published in 2022 - IPC G01P15/125 

FIELD: micromechanical accelerometers.

SUBSTANCE: micromechanical accelerometer contains a base, a sensitive element consisting of a two-arm pendulum made of single-crystal silicon, a glass lining, an outer frame with attachment sites to the glass lining, connected to the two-arm pendulum through elastic torsion bars. Pedestals are formed at the base, elastically deformable cells are formed, connected to the outer frame through beams. The beams are formed and connected to the outer corners of the outer frame. Cross-shaped through slots are symmetrically formed on two sides of the outer frame on both sides of the transverse axis at the points of conjugation of elastic torsion bars and attachment sites to the glass lining.

EFFECT: invention increases the accuracy of the accelerometer.

1 cl, 3 dwg