MICROMECHANICAL ACCELEROMETER WITH LOW SENSITIVITY TO THERMOMECHANICAL INFLUENCES Russian patent published in 2021 - IPC G01P1/00 

FIELD: measurement equipment.

SUBSTANCE: invention relates to measurement equipment and can be used in micromechanical accelerometers, microgyroscopes, integral pressure sensors. A micromechanical accelerometer with a low sensitivity to thermomechanical influences contains a double-arm pendulum made of monocrystalline silicon, a glass plate, an outer frame with pads for attachment to the glass plate. The outer frame is connected to the two-arm pendulum through elastic torsion bars. An additional support frame is formed, connected to the outer frame through rigid beams. The pads for attaching to the glass cover are formed on an additional support frame.

EFFECT: increased accuracy and reduced labor intensity.

1 cl, 2 dwg