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2 379 693

(13)

(51)

IPC

G01P15/08(2006-01-01)

(21) (22)

Application

2008140875/28, 2008-10-16

(24)

Start date

2008-10-16

(22)

Actual filing date

2008-10-16

(45)

Published

2010-01-20

(72)

Inventor

Timoshenkov Sergej PetrovichChaplygin Jurij AleksandrovichMironov Sergej Gennad'EvichShilov Valerij FedorovichRubchits Vadim Grigor'EvichMorozova Elena Sergeevna

(73)

Holder

Moskovskij Gosudarstvennyj Institut Ehlektronnoj Tekhniki Universitet)Obshchestvo S Ogranichennoj Otvetstvennost'Ju Itmeh"

SENSITIVE ELEMENT OF INTEGRAL ACCELEROMETRE Russian patent published in 2010 - IPC G01P15/08

Abstract RU 2379693 C1

FIELD: measurement equipment.

SUBSTANCE: invention is related to measurement equipment and may be used to manufacture integral accelerometres. Sensitive element is made of conducting single-crystal silicon and comprises pendulum connected with the help of elastic suspensions with carcass frame, which, via fixed beam, and is connected to bearing frame with the help of cantilever arrangement. Bearing frame is rigidly connected to accelerometre base by platform sites, which makes it possible to avoid contact stresses in carcass frame that impact device accuracy.

EFFECT: improved accuracy of device.

2 dwg

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RU 2 379 693 C1

Authors

Timoshenkov Sergej Petrovich

Chaplygin Jurij Aleksandrovich

Mironov Sergej Gennad'Evich

Shilov Valerij Fedorovich

Rubchits Vadim Grigor'Evich

Morozova Elena Sergeevna

Dates

2010-01-20—Published

2008-10-16—Filed