NANOSONDE OF SCANNING MICROSCOPE Russian patent published in 2019 - IPC G01Q70/12 G01Q20/00 B82Y35/00 

Abstract RU 2687180 C1

FIELD: nanotechnologies.

SUBSTANCE: invention relates to nanotechnology and specifically to devices which provide information on topology and other properties of the surface of an object. Scanning microscope nanosonde consists of series-connected working element of nanoprobe, cantilever, holder, cantilever natural frequency pickup and cantilever optical movement sensor, optically connected to cantilever, as well as the working element drive and the working element position mismatch signal generation unit, the inputs of which are connected to the outputs of the optical motion sensor of the console and the natural frequency oscillation sensor of the console. Output of the signal generating unit is connected to the input of the drive of the working element, the second input of which is connected to the console. Working element is in form of a carbon nanotube.

EFFECT: technical result of invention is higher accuracy and reliability of microscope probe.

1 cl, 1 dwg

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RU 2 687 180 C1

Authors

Barchukov Dmitrij Anatolevich

Slobodyan Stepan Mikhajlovich

Dates

2019-05-07Published

2018-08-01Filed