FIELD: technology for making images of extremely high resolution.
SUBSTANCE: device has source for producing electromagnetic radiation in range of wave length 100 nm and below, space modulator, having multiple pixels, electronic system for processing and transferring data, receiving digital description of drawing, subject to being drawn, separating from it a series of partial drawings, forming said partial drawings as modulator signals and sending said signals into modulator, and precision mechanical system for moving said block and/or projection circuit relatively one another. Device also has electronic control system coordinating movement of block, sending signals into modulator and intensiveness of radiation, so that said drawing was sewn together of partial images, formed by series of partial drawings.
EFFECT: device using electromagnetic radiation source in waves range 100 nm and below.
8 cl, 7 dwg
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Authors
Dates
2005-07-27—Published
1999-03-02—Filed