FIELD: producing thin coating films for electronic, atomic, and other fields of science and technology.
SUBSTANCE: proposed mosaic target has steel matrix with cooled base accommodating in its cavities spraying elements. Used as matrix elements are powders whose grain size depends on their properties. Elements are disposed in matrix in the form of cells to form areas of gradual transition of one element into another at boundary of their contact so as to reduce linear nonuniformity of their distribution over target surface. Proposed target manufacturing process is also given in description of invention.
EFFECT: enhanced spraying capacity and quality of multicomponent films.
2 cl, 6 dwg, 2 tbl
| Title | Year | Author | Number |
|---|---|---|---|
| TARGET FOR APPLYING FILM COATINGS OF COMPLEX COMPOSITION AND ITS MANUFACTURING PROCESS | 2003 |
|
RU2262151C1 |
| METHOD OF FORMING MULTI-COMPONENT STOICHIOMETRIC FILM COAT | 2004 |
|
RU2290453C2 |
| PROCESS OF ION-PLASMA DEPOSITION OF MULTICOMPONENT FILM COATS , MOSAIC TARGET FOR ITS IMPLEMENTATION AND PROCESS OF MANUFACTURE OF TARGET | 2001 |
|
RU2210620C1 |
| MATERIAL FOR METAL-FILM RESISTIVE LAYER AND METHOD FOR PRODUCING A RESISTIVE LAYER ON BASIS OF SAID MATERIAL | 2001 |
|
RU2280905C2 |
| CHARGE FOR COMPOSITE CATHODE, AND METHOD FOR ITS MANUFACTURE | 2011 |
|
RU2454474C1 |
| METHOD OF ION-PLASMA SPRAYING COATING OF MULTICOMPONENT FILM COATINGS AND INSTALLATION FOR ITS IMPLEMENTATION | 2006 |
|
RU2379378C2 |
| MANUFACTURING METHOD OF SPUTTERING TARGETS FROM CAST DISILICIDE OF REFRACTORY METAL AND FACILITY FOR ITS IMPLEMENTATION | 2007 |
|
RU2356964C1 |
| PRODUCTION OF COMPOSITE CATHODE FOR APPLICATION OF MULTICOMPONENT ION-PLASMA COATINGS | 2013 |
|
RU2534324C1 |
| CATHODE DEVICE | 0 |
|
SU699032A1 |
| PROCESS OF MANUFACTURE OF PHOTOSENSITIVE, RESISTIVE AND OPTICALLY NONLINEAR COMPOSITION FILMS BASED ON HIGH AND LOW REFRACTIVE MATERIALS | 1994 |
|
RU2103846C1 |
