TARGET FOR APPLYING FILM COATINGS OF COMPLEX COMPOSITION AND ITS MANUFACTURING PROCESS Russian patent published in 2005 - IPC

Abstract RU 2262151 C1

FIELD: thin-film technology; electronic, atomic, and other fields of science and technology.

SUBSTANCE: proposed mosaic target designed for applying multicomponent film coatings has matrix and fusible components disposed in its depressions. Fusible components are placed in matrix in the form of powders having different density and surface area, dependencies between them being governed by properties of elements and stoichiometric coefficients or percentage of film material components. Method for manufacturing claimed target is also proposed.

EFFECT: enhanced quality of composite coatings.

2 cl, 2 dwg, 2 tbl

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RU 2 262 151 C1

Authors

Igumnov V.N.

Buev A.R.

Filimonov V.E.

Dates

2005-10-10—Published

2003-12-29—Filed