SUPERHIGH-VACUUM SCANNING SOUNDING MICROSCOPE Russian patent published in 2000 - IPC

FIELD: nano- technological equipment, devices ensuring observation, measurement and updating of surfaces of objects under tunnel and atomic power modes. SUBSTANCE: microscope has first and second vacuum chambers, manipulator, platform carrying drive with scanner, sonde holder with sonde, light source and photodetector optically coupled to sonde, plate with object holder aligned with platform by means of drive and suspension system, flange with cover and first bellows. Second vacuum chamber is formed by flange with cover which is linked via first bellows to platform and presents forvacuum chamber. Drive is positioned in forvacuum chamber and is fitted with motor whose rod moves linearly, two rests and springs. Scanner is manufactured in the form of piezotube. Suspension system is made of springs, locks and magnetic damper mounted on platform and flange. EFFECT: simplified design and adjustment, expanded functional capabilities, increased reliability and resolving power of microscope. 2 dwg