FIELD: electrical engineering;; production of plates for plate grid.
SUBSTANCE: proposed method for producing plates of high shape factor for plate grid incorporating densely disposed parallel plates includes formation of plates in the course of multiple sequential process operations implying use of same photomask for each shaping operation. In the process desired shape factor is obtained by sequence of operations repeated as many times as required , this being followed by final planarization of plate grid.
EFFECT: reduced production cost, enhanced uniformity and smoothness of side walls of plates.
15 cl, 20 dwg
